Publication detail

The Simulation of Energy Distribution of Electrons Detected by Segmental Ionization Detector in High Pressure Conditions of ESEM

NEDĚLA, V. KONVALINA, I. ORAL, M. HUDEC, J.

Original Title

The Simulation of Energy Distribution of Electrons Detected by Segmental Ionization Detector in High Pressure Conditions of ESEM

Type

journal article - other

Language

English

Original Abstract

This paper presents computed dependencies of the detected electron energy distribution on the water vapour pressure in an environmental scanning electron microscope obtained using the EOD software with a Monte Carlo plug-in for the electron-gas interactions. The software GEANT was used for the Monte Carlo simulations of the beam-sample interactions and the signal electron emission from the sample into the gaseous environment. The simulations were carried out for selected energies of the signal electrons collected by two electrodes with two different diameters with the voltages of +350 V and 0, and then 0 and +350 V, respectively, and for the distance of 2 mm between the sample and the detection electrodes of the ionization detector. The simulated results are verified by experimental measurements. Consequences of the simulated and experimental dependencies on the acquisition of the topographical or material contrasts using our ionization detector equipped with segmented detection electrode are described and discussed.

Keywords

Electron-gas interactions, Monte Carlo simulation, signal amplification, segmented ionization detector.

Authors

NEDĚLA, V.; KONVALINA, I.; ORAL, M.; HUDEC, J.

Released

30. 6. 2015

Publisher

Cambridge University Press

ISBN

1431-9276

Periodical

MICROSCOPY AND MICROANALYSIS

Year of study

2015

State

United States of America

Pages from

264

Pages to

269

Pages count

6

URL

http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=9966444&fileId=S1431927615013483

BibTex

@article{BUT114302,
  author="Vilém {Neděla} and Ivo {Konvalina} and Martin {Oral} and Jiří {Hudec}",
  title="The Simulation of Energy Distribution of Electrons Detected by Segmental Ionization Detector in High Pressure Conditions of ESEM",
  journal="MICROSCOPY AND MICROANALYSIS",
  year="2015",
  volume="2015",
  pages="264--269",
  doi="10.1017/S1431927615013483",
  issn="1431-9276",
  url="http://journals.cambridge.org/action/displayAbstract?fromPage=online&aid=9966444&fileId=S1431927615013483"
}