Publication detail

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

STACH, S. DALLAEVA, D. TALU, S. KASPAR, P. TOMÁNEK, P. GIOVANZANA, S. GRMELA, L.

Original Title

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Czech Title

Morfologické detaily v AlN epivrstvách připravených magnetronovým napařováním

English Title

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Type

journal article

Language

en

Original Abstract

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties

Czech abstract

Cílem této studie je charakterizovat topografii povrchu AlN epivrstev připravených pomocí magnetronového napařování. K tomu využíváme statistické parametry povrchu dle normy ISO 25178-2:2012. Abychom pochopili vliv teploty, byla topografie povrchu provedena pomocí AFM mikroskopu. Data z AFM mikroskopu a analýza statistických parametrů povrchu ukazují závislost morfologie epivrstev na podmínkách jejich růstu. Statistické parametry poskytují důležité informace o textuře povrchu a jsou významné pro výrobu tenkých vrstev AlN se zlepšenými charakteristikami povrchu. Tyto výsledky jsou také důležité pro pochopení jevů v nanoměřítku v kontaktních bodech drsných povrchů - oblasti kontaktu, separace rozhraní a o adhesivních a frikčních vlastnostech.

English abstract

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties

Keywords

aluminum nitride epilayer; atomic force microscopy; magnetron sputtering; substrate; surface roughness

RIV year

2015

Released

01.01.2015

Publisher

De Gruyter Open

Location

Warszaw, Poland

Pages from

175

Pages to

184

Pages count

10

BibTex


@article{BUT113282,
  author="Sebastian {Stach} and Dinara {Sobola} and Stefan {Talu} and Pavel {Kaspar} and Pavel {Tománek} and Stefano {Giovanzana} and Lubomír {Grmela}",
  title="Morphological features in aluminum nitride epilayers prepared by magnetron sputtering",
  annote="The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron
sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature
on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and
analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions.
The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale
phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties",
  address="De Gruyter Open",
  chapter="113282",
  doi="10.1515/msp-2015-0036",
  institution="De Gruyter Open",
  number="1",
  volume="33",
  year="2015",
  month="january",
  pages="175--184",
  publisher="De Gruyter Open",
  type="journal article"
}