Publication detail

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

STACH, S. DALLAEVA, D. TALU, S. KASPAR, P. TOMÁNEK, P. GIOVANZANA, S. GRMELA, L.

Original Title

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Type

journal article in Web of Science

Language

English

Original Abstract

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties.

Keywords

aluminum nitride epilayer; atomic force microscopy; magnetron sputtering; substrate; surface roughness

Authors

STACH, S.; DALLAEVA, D.; TALU, S.; KASPAR, P.; TOMÁNEK, P.; GIOVANZANA, S.; GRMELA, L.

RIV year

2015

Released

1. 1. 2015

Publisher

De Gruyter Open

Location

Warszaw, Poland

ISBN

0137-1339

Periodical

MATERIALS SCIENCE-POLAND

Year of study

33

Number

1

State

Republic of Poland

Pages from

175

Pages to

184

Pages count

10

URL

https://www.sciendo.com/article/10.1515/msp-2015-0036

Full text in the Digital Library

http://hdl.handle.net/11012/201713

BibTex

@article{BUT113282,
  author="Sebastian {Stach} and Dinara {Sobola} and Stefan {Talu} and Pavel {Kaspar} and Pavel {Tománek} and Stefano {Giovanzana} and Lubomír {Grmela}",
  title="Morphological features in aluminum nitride epilayers prepared by magnetron sputtering",
  journal="MATERIALS SCIENCE-POLAND",
  year="2015",
  volume="33",
  number="1",
  pages="175--184",
  doi="10.1515/msp-2015-0036",
  issn="0137-1339",
  url="https://www.sciendo.com/article/10.1515/msp-2015-0036"
}