Publication detail

Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers

VAZQUEZ, R. MOZALEV, A. LLOBET, E.

Original Title

Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers

Type

conference paper

Language

English

Original Abstract

Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported

Keywords

niobium oxide, anodizing, porous alumina, nanostructure, hydrogen sensor

Authors

VAZQUEZ, R.; MOZALEV, A.; LLOBET, E.

RIV year

2014

Released

31. 12. 2014

Publisher

Elsevier

Location

Netherlands

ISBN

978-1-5108-0586-6

Book

SOLID-STATE TRANSDUCERS. EUROPEAN CONFERENCE. 28TH 2014. (EUROSENSORS 2014)

ISBN

1877-7058

Periodical

Procedia Engineering

Year of study

87

Number

-

State

Kingdom of the Netherlands

Pages from

811

Pages to

814

Pages count

4

URL

https://www.sciencedirect.com/science/article/pii/S1877705814027969

Full text in the Digital Library

http://hdl.handle.net/11012/194753

BibTex

@inproceedings{BUT111098,
  author="Rosa Maria {Vazquez} and Alexander {Mozalev} and Eduard {Llobet}",
  title="Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers",
  booktitle="SOLID-STATE TRANSDUCERS. EUROPEAN CONFERENCE. 28TH 2014. (EUROSENSORS 2014)",
  year="2014",
  journal="Procedia Engineering",
  volume="87",
  number="-",
  pages="811--814",
  publisher="Elsevier",
  address="Netherlands",
  doi="10.1016/j.proeng.2014.11.674",
  isbn="978-1-5108-0586-6",
  issn="1877-7058",
  url="https://www.sciencedirect.com/science/article/pii/S1877705814027969"
}