Publication detail

Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

SANTO-ZARNIK, M. BELAVIC, D. SEDLÁKOVÁ, V. ŠIKULA, J. KOPECKÝ, M. SEDLÁK, P. MAJZNER, J.

Original Title

Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

English Title

Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

Type

journal article - other

Language

en

Original Abstract

A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar silicon pressure sensor.

English abstract

A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar silicon pressure sensor.

Keywords

LTCC pressure sensor, intrinsic resolution, noise spectral density

RIV year

2013

Released

01.04.2013

Pages from

227

Pages to

232

Pages count

6

BibTex


@article{BUT102023,
  author="Marina {Santo-Zarnik} and Darko {Belavic} and Vlasta {Sedláková} and Josef {Šikula} and Martin {Kopecký} and Petr {Sedlák} and Jiří {Majzner}",
  title="Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements",
  annote="A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar silicon pressure sensor.",
  chapter="102023",
  number="1",
  volume="22",
  year="2013",
  month="april",
  pages="227--232",
  type="journal article - other"
}