Publication detail

Protection by Deposition of Parylene and SiOx Thin Layers

BALAŠTÍKOVÁ, R. PROCHÁZKA, M. MENČÍK, P. HORÁK, J. PŘIKRYL, R. KRČMA, F.

Original Title

Protection by Deposition of Parylene and SiOx Thin Layers

English Title

Protection by Deposition of Parylene and SiOx Thin Layers

Type

conference paper

Language

en

Original Abstract

The aim of this work is protection of archaeological artefacts due to the thin films of parylene and SiOx. Thin films of parylene were prepared by CVD technique and SiOx thin films were prepared by PECVD. This thin films were characterized by various methods, for example by SEM, OTR, XPS and FTIR.

English abstract

The aim of this work is protection of archaeological artefacts due to the thin films of parylene and SiOx. Thin films of parylene were prepared by CVD technique and SiOx thin films were prepared by PECVD. This thin films were characterized by various methods, for example by SEM, OTR, XPS and FTIR.

Keywords

Thin film, parylene, SiOx, archaeological artefacts

RIV year

2012

Released

07.12.2012

Publisher

FCH VUT

Location

Brno

ISBN

978-80-214-4644-1

Book

Studentská odborná konference Chemie je život 2012, Sborník příspěvků

Pages from

267

Pages to

270

Pages count

4

BibTex


@inproceedings{BUT101789,
  author="Radka {Veverková} and Michal {Procházka} and Přemysl {Menčík} and Jakub {Horák} and Radek {Přikryl} and František {Krčma}",
  title="Protection by Deposition of Parylene and SiOx Thin Layers",
  annote="The aim of this work is protection of archaeological artefacts due to the thin films of parylene and SiOx. Thin films of parylene were prepared by CVD technique and SiOx thin films were prepared by PECVD. This thin films were characterized by various methods, for example by SEM, OTR, XPS and FTIR.",
  address="FCH VUT",
  booktitle="Studentská odborná konference Chemie je život 2012, Sborník příspěvků",
  chapter="101789",
  howpublished="electronic, physical medium",
  institution="FCH VUT",
  year="2012",
  month="december",
  pages="267--270",
  publisher="FCH VUT",
  type="conference paper"
}