Publication detail

INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

SANTO-ZARNIK, M. BELAVIČ, D. SEDLÁKOVÁ, V. ŠIKULA, J. KOPECKÝ, M. SEDLÁK, P. MAJZNER, J.

Original Title

INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

English Title

INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

Type

conference paper

Language

en

Original Abstract

A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.

English abstract

A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.

Keywords

LTCC pressure sensor, intrinsic resolution, noise spectral density

RIV year

2012

Released

28.06.2012

Publisher

IMAPS CZ&SK

ISBN

978-80-214-4539-0

Book

EDS 2012 Proceedings

Pages from

251

Pages to

256

Pages count

6

BibTex


@inproceedings{BUT95974,
  author="Marina {Santo-Zarnik} and Darko {Belavič} and Vlasta {Sedláková} and Josef {Šikula} and Martin {Kopecký} and Petr {Sedlák} and Jiří {Majzner}",
  title="INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR",
  annote="A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.",
  address="IMAPS CZ&SK",
  booktitle="EDS 2012 Proceedings",
  chapter="95974",
  howpublished="print",
  institution="IMAPS CZ&SK",
  year="2012",
  month="june",
  pages="251--256",
  publisher="IMAPS CZ&SK",
  type="conference paper"
}