Publication detail

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

VÁLEK, L. ŠIK, J.

Original Title

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Type

book chapter

Language

English

Original Abstract

The chapter on the growth of single crystals of Czochralski silicon and formation and control of crystal defects in silicon. The book deals with bulk crystal growth and thin film preparation.

Keywords

silicon; single crystal; defects

Authors

VÁLEK, L.; ŠIK, J.

RIV year

2012

Released

13. 1. 2012

Publisher

INTECH

Location

Rieka, Croatia

ISBN

978-953-307-610-2

Book

Modern Aspects of Bulk Crystal and Thin Film Preparation

Edition

1

Edition number

1

Pages from

43

Pages to

70

Pages count

28

BibTex

@inbook{BUT89045,
  author="Lukáš {Válek} and Jan {Šik}",
  title="Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing",
  booktitle="Modern Aspects of Bulk Crystal and Thin Film Preparation",
  year="2012",
  publisher="INTECH",
  address="Rieka, Croatia",
  series="1",
  edition="1",
  pages="43--70",
  isbn="978-953-307-610-2"
}