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SCHAUER, F., SALYK, O.
Original Title
Thermal desorption spectroscopy of hydrogen from a-Si:H
Type
conference paper
Language
English
Original Abstract
The thermal desorption spectroscopy is a modern analytical method for organic substances, but it can be used in special cases for anorganic analysis, e.g. for hydrogen asses in amorphous hydrogenated silicon. It helps to evaluate the concentration of gas elements or substances in bulk solids or thin solid films, their bonding energy and structure of crystalline or amorphous network. This method was utilised for the amorphous hydrogenated silicon analysis
Key words in English
amorphous hydrohenated silicon, hydrogen, concentration, desorption
Authors
Released
1. 7. 1993
Location
Liptovský MIkuláš
Pages from
51
BibTex
@inproceedings{BUT6391, author="František {Schauer} and Ota {Salyk}", title="Thermal desorption spectroscopy of hydrogen from a-Si:H", booktitle="Conference Thin Films", year="1993", address="Liptovský MIkuláš" }