Publication detail

Thermal desorption spectroscopy of hydrogen from a-Si:H

SCHAUER, F., SALYK, O.

Original Title

Thermal desorption spectroscopy of hydrogen from a-Si:H

Type

conference paper

Language

English

Original Abstract

The thermal desorption spectroscopy is a modern analytical method for organic substances, but it can be used in special cases for anorganic analysis, e.g. for hydrogen asses in amorphous hydrogenated silicon. It helps to evaluate the concentration of gas elements or substances in bulk solids or thin solid films, their bonding energy and structure of crystalline or amorphous network. This method was utilised for the amorphous hydrogenated silicon analysis

Key words in English

amorphous hydrohenated silicon, hydrogen, concentration, desorption

Authors

SCHAUER, F., SALYK, O.

Released

1. 7. 1993

Location

Liptovský MIkuláš

Pages from

51

BibTex

@inproceedings{BUT6391,
  author="František {Schauer} and Ota {Salyk}",
  title="Thermal desorption spectroscopy of hydrogen from a-Si:H",
  booktitle="Conference Thin Films",
  year="1993",
  address="Liptovský MIkuláš"
}