Publication detail

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. FRANTA, D.

Original Title

Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films

Type

abstract

Language

English

Original Abstract

An novel efficient method enabling us to perform the complete optical analysis of diamond-like carbon thin films exhibiting area non-uniformity in optical parameters is presented.

Keywords

Optical instrumentation, DLC films, optical non-uniformity

Authors

OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; FRANTA, D.

Released

26. 5. 2008

Publisher

Academia Sinica, Taiwan

Location

Taipei

Pages from

422

Pages to

422

Pages count

1

BibTex

@misc{BUT60755,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and Daniel {Franta}",
  title="Application of imaging spectroscopic reflectometry to analysis of area non-uniformity of diamond-like carbon films",
  year="2008",
  pages="422--422",
  publisher="Academia Sinica, Taiwan",
  address="Taipei",
  note="abstract"
}