Publication detail

Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)

LÉTAL, P., TOMÁNEK, P., DOBIS, P., GRMELA, L., BRÜSTLOVÁ, J.

Original Title

Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)

Type

book chapter

Language

English

Original Abstract

Locally resolved topography and spectroscopy of semiconductors show both the better lateral resolution than 250 nm using nondestructive testing.

Keywords

local topography, local spectroscopy, semiconductors, SNOM

Authors

LÉTAL, P., TOMÁNEK, P., DOBIS, P., GRMELA, L., BRÜSTLOVÁ, J.

RIV year

1998

Released

20. 9. 1998

Publisher

Technical University of Brno

Location

Brno

ISBN

80-214-119

Book

Electronic devices and systems (EDS´98)

Pages from

169

Pages to

172

Pages count

4

BibTex

@inbook{BUT54077,
  author="Petr {Létal} and Pavel {Tománek} and Pavel {Dobis} and Lubomír {Grmela} and Jitka {Brüstlová}",
  title="Locally resolved topography and spectroscopy of semiconductors (with lateral resolution better than 250 nm)",
  booktitle="Electronic devices and systems (EDS´98)",
  year="1998",
  publisher="Technical University of Brno",
  address="Brno",
  pages="4",
  isbn="80-214-119"
}