Publication detail

A new tool for the post-process modification of chips by nanostructures for chemical sensing

HUBÁLEK, J. HRDÝ, R. VOROZHTSOVA, M.

Original Title

A new tool for the post-process modification of chips by nanostructures for chemical sensing

English Title

A new tool for the post-process modification of chips by nanostructures for chemical sensing

Type

journal article

Language

en

Original Abstract

The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.

English abstract

The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.

Keywords

chemical sensors, nanostructured electrodes, electrochemical deposition, etching

RIV year

2009

Released

06.09.2009

Publisher

Elsevier BV

Location

Lausanne, Switzerland

Pages from

36

Pages to

39

Pages count

4

BibTex


@article{BUT47622,
  author="Jaromír {Hubálek} and Radim {Hrdý} and Marina {Macháčková}",
  title="A new tool for the post-process modification of chips by nanostructures for chemical sensing",
  annote="The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the tool were also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.",
  address="Elsevier BV",
  chapter="47622",
  institution="Elsevier BV",
  journal="Procedia Chemistry: Proceedings of the Eurosensors XXIII conference",
  number="1",
  volume="1",
  year="2009",
  month="september",
  pages="36--39",
  publisher="Elsevier BV",
  type="journal article"
}