Publication detail

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

PREZIOSO, S., LUCIANI, D., TUCCERI, P., deMARCO, P., GAUDIERI, A., KAISER, J., SANTUCCI, S., OTTAVIANO, L., ZUPPELLA, P.,

Original Title

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

Type

conference paper

Language

English

Original Abstract

Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported. The laser was developed in a frame of international cooperation at the University of LAquila, Italy. Interference Nano-Litography is one of the svereal applications this laser is used for.

Keywords

nano-litography, soft X-ray laser, Ar+8, 46.9 nm

Authors

PREZIOSO, S., LUCIANI, D., TUCCERI, P., deMARCO, P., GAUDIERI, A., KAISER, J., SANTUCCI, S., OTTAVIANO, L., ZUPPELLA, P.,

RIV year

2009

Released

1. 9. 2009

Publisher

Task Publishing

Location

Gdansk, Poland

ISBN

978-83-908112-7-7

Book

Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter

Edition number

1

Pages from

249

Pages to

249

Pages count

1

BibTex

@inproceedings{BUT32646,
  author="Jozef {Kaiser}",
  title="Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography",
  booktitle="Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter",
  year="2009",
  number="1",
  pages="249--249",
  publisher="Task Publishing",
  address="Gdansk, Poland",
  isbn="978-83-908112-7-7"
}