Publication detail

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

KADLEC, J. JELÍNEK, M. KOCOUREK, T. DVOŘÁK, M. JOSKA, Z.

Original Title

Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films

Type

conference paper

Language

English

Original Abstract

Hybrid laser-magnetron deposition systéme was developed and tested for study carbon based thin films. Films were fabricated in argon (TiC) and in argon/nitrogen (TiCN). Crystaline films were grown at room substrate temperature. Film properties were studied by SEM, XRD, XPS and GDOES

Keywords

Hybrid deposicion, structure properties, TiC-TiCN films

Authors

KADLEC, J.; JELÍNEK, M.; KOCOUREK, T.; DVOŘÁK, M.; JOSKA, Z.

RIV year

2008

Released

30. 6. 2008

Publisher

Brno University of Technology

Location

Brno

ISBN

978-80-214-3659-6

Book

9th ABA

Edition

1

Edition number

1

Pages from

32

Pages to

36

Pages count

5

BibTex

@inproceedings{BUT32392,
  author="Jaromír {Kadlec} and Miroslav {Jelínek} and Tomáš {Kocourek} and Milan {Dvořák} and Zdeněk {Joska}",
  title="Hybrid Laser-Magnetron Deposition of TiC and TiCN Thin Films",
  booktitle="9th ABA",
  year="2008",
  series="1",
  number="1",
  pages="32--36",
  publisher="Brno University of Technology",
  address="Brno",
  isbn="978-80-214-3659-6"
}