Publication detail

Fabrication and Noise Diagnostics of Schottky Cathodes

Original Title

Fabrication and Noise Diagnostics of Schottky Cathodes

Czech Title

Fabrication and Noise Diagnostics of Schottky Cathodes

Language

cs

Original Abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper

Czech abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper

BibTex


@inproceedings{BUT31380,
  author="Alexandr {Knápek}",
  title="Fabrication and Noise Diagnostics of Schottky Cathodes",
  annote="The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper",
  address="NOVPRESS",
  booktitle="Proceedings of the 15th Conference, Student EEICT 2009, Volume 3",
  chapter="31380",
  howpublished="print",
  institution="NOVPRESS",
  year="2009",
  month="april",
  pages="142--146",
  publisher="NOVPRESS",
  type="conference paper"
}