Publication detail

The integrated unit for MEMS based pressure measurement

HÁZE, J. VRBA, R. PAVLÍK, M.

Original Title

The integrated unit for MEMS based pressure measurement

English Title

The integrated unit for MEMS based pressure measurement

Type

conference paper

Language

en

Original Abstract

The article deals with a custom based integrated measurement unit (IMU), which serves as processing device for MEMS based pressure measurement. The IMU consists of the three elementar stages, measurement stage, processing stage and communication stage. They are implemented on the one single board. The measurement block has 16-bit resolution with 64 provided measurement ranges to sutisfy appropriate accuracy. The power supply is 5 V, which allows to measure current with 238 nA step within 1 mA measurement range. The communication stage is based upon I2C standard.

English abstract

The article deals with a custom based integrated measurement unit (IMU), which serves as processing device for MEMS based pressure measurement. The IMU consists of the three elementar stages, measurement stage, processing stage and communication stage. They are implemented on the one single board. The measurement block has 16-bit resolution with 64 provided measurement ranges to sutisfy appropriate accuracy. The power supply is 5 V, which allows to measure current with 238 nA step within 1 mA measurement range. The communication stage is based upon I2C standard.

Keywords

integrated unit, MEMS, sensor

RIV year

2009

Released

01.03.2009

Publisher

IEEE

Location

France

ISBN

978-1-4244-3469-5

Book

Proceedings of ICONS 2009 Fourth International Conference on Systems

Pages from

100

Pages to

103

Pages count

4

BibTex


@inproceedings{BUT29225,
  author="Jiří {Háze} and Radimír {Vrba} and Michal {Pavlík}",
  title="The integrated unit for MEMS based pressure measurement",
  annote="The article deals with a custom based integrated measurement unit (IMU), which serves as processing device for MEMS based pressure measurement. The IMU consists of the three elementar stages, measurement stage, processing stage and communication stage. They are implemented on the one single board. The measurement block has 16-bit resolution with 64 provided measurement ranges to sutisfy appropriate accuracy. The power supply is 5 V, which allows to measure current with 238 nA step within 1 mA measurement range. The communication stage is based upon I2C standard.",
  address="IEEE",
  booktitle="Proceedings of ICONS 2009 Fourth International Conference on Systems",
  chapter="29225",
  howpublished="electronic, physical medium",
  institution="IEEE",
  year="2009",
  month="march",
  pages="100--103",
  publisher="IEEE",
  type="conference paper"
}