Publication detail

Position Sensing of Electrostatic MEMS Actuator

KOLKA, Z. BIOLKOVÁ, V. BIOLEK, D.

Original Title

Position Sensing of Electrostatic MEMS Actuator

Type

conference paper

Language

English

Original Abstract

The paper deals with a sensing technique for electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The weight of the load and the torsional elasticity form a mechanical resonant system with a relatively high quality factor, which is prone to parasitic oscillations. The paper studies a damping feedback loop with an all-electrical sensing of the drive angular position. The sensing bridge works with any comb drive not requiring dedicated fingers to sense the position. An experimental realization of the loop with dual-axis mirror drive is presented.

Keywords

MEMS, electrostatic actuator, damping, control loop, modeling, simulation

Authors

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.

Released

24. 10. 2022

Publisher

IEEE

Location

Glasgow, United Kingdom

ISBN

9781665488235

Book

2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS 2022)

Pages count

4

URL

https://ieeexplore.ieee.org/document/9971110

BibTex

@inproceedings{BUT180674,
  author="Zdeněk {Kolka} and Viera {Biolková} and Dalibor {Biolek}",
  title="Position Sensing of Electrostatic MEMS Actuator",
  booktitle="2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS 2022)",
  year="2022",
  pages="4",
  publisher="IEEE",
  address="Glasgow, United Kingdom",
  doi="10.1109/ICECS202256217.2022.9971110",
  isbn="9781665488235",
  url="https://ieeexplore.ieee.org/document/9971110"
}