Publication detail

Plasma-enhanced CVD of functional coatings in Ar/maleic anhydride/C2H2 homogeneous dielectric barrier discharges at atmospheric pressure

ZAJÍČKOVÁ, L. JELÍNEK, P. OBRUSNÍK, A. VODÁK, J. NEČAS, D.

Original Title

Plasma-enhanced CVD of functional coatings in Ar/maleic anhydride/C2H2 homogeneous dielectric barrier discharges at atmospheric pressure

Type

journal article in Web of Science

Language

English

Original Abstract

In this contribution, we focus on the general problems of plasma-enhanced chemical vapor deposition in atmospheric pressure dielectric barrier discharges, i.e. deposition uniformity, film roughness and the formation of dust particles, and demonstrate them on the example of carboxyl coatings prepared by co-polymerization of acetylene and maleic anhydride. Since the transport of monomers at atmospheric pressure is advection-driven, special attention is paid to the gas dynamics simulations, gas flow patterns, velocity and residence time. By using numerical simulations, we design an optimized gas supply geometry capable of synthesizing uniform layers. The selection of the gas mixture containing acetylene was motivated by two of its characteristics: (i) suppression of filaments in dielectric barrier discharges, and (ii) improved film cross-linking, keeping the amount of functional groups high. However, acetylene discharges are prone to the formation of nanoparticles that can be incorporated into the deposited films, leading to their high roughness. Therefore, we also discuss the role of the gas composition, the spatial position of the substrate with respect to gas flow and the deposition time on the topography of the deposited films.

Keywords

PECVD; plasma polymerization; carboxyl films; gas dynamics simulations; atomic force microscopy

Authors

ZAJÍČKOVÁ, L.; JELÍNEK, P.; OBRUSNÍK, A.; VODÁK, J.; NEČAS, D.

Released

30. 1. 2017

Publisher

IOP PUBLISHING LTD

Location

BRISTOL

ISBN

1361-6587

Periodical

Plasma Physics and Controlled Fusion

Year of study

59

Number

3

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

13

Pages count

13

URL

https://iopscience.iop.org/article/10.1088/1361-6587/aa52e7

BibTex

@article{BUT170464,
  author="ZAJÍČKOVÁ, L. and JELÍNEK, P. and OBRUSNÍK, A. and VODÁK, J. and NEČAS, D.",
  title="Plasma-enhanced CVD of functional coatings in Ar/maleic anhydride/C2H2 homogeneous dielectric barrier discharges at atmospheric pressure",
  journal="Plasma Physics and Controlled Fusion",
  year="2017",
  volume="59",
  number="3",
  pages="1--13",
  doi="10.1088/1361-6587/aa52e7",
  issn="1361-6587",
  url="https://iopscience.iop.org/article/10.1088/1361-6587/aa52e7"
}