Publication detail

Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer

MATERNA MIKMEKOVÁ, E. MÜLLEROVÁ, I. FRANK, L. POLČÁK, J. SLUYTERMAN, S. LEJEUNE, M. KONVALINA, I.

Original Title

Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer

Type

journal article in Web of Science

Language

English

Original Abstract

Two-dimensional materials, such as graphene, are usually prepared by chemical vapor deposition (CVD) on selected substrates, and their transfer is completed with a supporting layer, mostly polymethyl methacrylate (PMMA). Indeed, the PMMA has to be removed precisely to obtain the predicted superior properties of graphene after the transfer process. We demonstrate a new and effective technique to achieve a polymer-free CVD graphene - by utilizing low-energy electron irradiation in a scanning low-energy electron microscope (SLEEM). The influence of electron-landing energy on cleaning efficiency and graphene quality was observed by SLEEM, Raman spectroscopy (the presence of disorder D peak) and XPS (the deconvolution of the C 1s peak). After removing the absorbed molecules and polymer residues from the graphene surface with slow electrons, the individual graphene layers can also be distinguished outside ultra-high vacuum conditions in both the reflected and transmitted modes of a scanning low-energy (transmission) electron microscope.

Keywords

Graphene; PMMA; Slow electron treatment; XPS; Raman spectroscopy

Authors

MATERNA MIKMEKOVÁ, E.; MÜLLEROVÁ, I.; FRANK, L.; POLČÁK, J.; SLUYTERMAN, S.; LEJEUNE, M.; KONVALINA, I.

Released

1. 5. 2020

Publisher

Elsevier

Location

AMSTERDAM

ISBN

0368-2048

Periodical

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA

Year of study

241

Number

1

State

Kingdom of the Netherlands

Pages from

1

Pages to

7

Pages count

7

URL

https://www.sciencedirect.com/science/article/pii/S0368204818302068

Full text in the Digital Library

http://hdl.handle.net/11012/195816

BibTex

@article{BUT167372,
  author="Eliška {Materna Mikmeková} and Ilona {Müllerová} and Luděk {Frank} and Josef {Polčák} and Seyno {Sluyterman} and Michaël {Lejeune} and Ivo {Konvalina}",
  title="Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer",
  journal="JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA",
  year="2020",
  volume="241",
  number="1",
  pages="1--7",
  doi="10.1016/j.elspec.2019.06.005",
  issn="0368-2048",
  url="https://www.sciencedirect.com/science/article/pii/S0368204818302068"
}

Documents

1-s2.0-S0368204818302068-main.pdf