Publication detail

Parylene Micropillars Coated with Thermally Grown SiO2

LIU, X. FECKO, P. FOHLEROVÁ, Z. PEKÁREK, J. KARÁSEK, T. NEUŽIL, P.

Original Title

Parylene Micropillars Coated with Thermally Grown SiO2

Type

journal article in Web of Science

Language

English

Original Abstract

The modification of surface properties frequently requires the binding of suitable compounds to the original surface. Silanes or thiols can be directly covalently bonded to either Si-based materials or Au, thus ruling out polymers. Here, we show the utilization of a layer of SiO2 with a thickness of a few nanometers that serves as a cross-linker between polymers and silanes providing covalent bonding to the surface. We deposited a polymer onto a thermally oxidized microstructured Si surface followed by subsequent Si removal. We demonstrated a Si-based nanotechnology fabrication method that can be generally used to modify the surface properties of practically any polymer via SiO2 cross-linking. This can produce any topology, including microstructures, nanostructures, or composite microstructure/nanostructures terminating in different shapes, since all the steps involving polymer deposition are conducted at room temperature after the Si surface has been thermally oxidized. This technique opens a broad field of new applications for polymers in microstructures and nanostructures that have stable water surface contact angle values with the contact angle set by demand for gecko-mimicking structures or lotus leaf inspired surfaces.

Keywords

micropillars, SiO2, parylene

Authors

LIU, X.; FECKO, P.; FOHLEROVÁ, Z.; PEKÁREK, J.; KARÁSEK, T.; NEUŽIL, P.

Released

9. 11. 2020

ISBN

2166-2746

Periodical

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Year of study

38

Number

1

State

United States of America

Pages from

38

Pages to

43

Pages count

6

URL

https://avs.scitation.org/doi/10.1116/6.0000558

BibTex

@article{BUT165596,
  author="LIU, X. and FECKO, P. and FOHLEROVÁ, Z. and PEKÁREK, J. and KARÁSEK, T. and NEUŽIL, P.",
  title="Parylene Micropillars Coated with Thermally Grown SiO2",
  journal="JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B",
  year="2020",
  volume="38",
  number="1",
  pages="38--43",
  doi="10.1116/6.0000558",
  issn="2166-2746",
  url="https://avs.scitation.org/doi/10.1116/6.0000558"
}