Publication detail

Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope

WANDROL, P.

Original Title

Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope

Type

conference paper

Language

English

Original Abstract

This paper deals with detection of backacattered electrons in scanning electron microscope when the accelerating voltage is 5 kV and less. New detection system for low energy backscattered electrons is shown.

Keywords

low voltage scanning electron microscopy, backscattered electrons, detection

Authors

WANDROL, P.

RIV year

2004

Released

29. 4. 2004

Publisher

Vysoké učení technické v Brně

Location

Brno

ISBN

80-214-2636-5

Book

Proceedings of the 10th conference Student EEICT 2004.

Edition number

1

Pages from

693

Pages to

696

Pages count

4

BibTex

@inproceedings{BUT14137,
  author="Petr {Wandrol}",
  title="Detection of Backscattered Electrons in Low Voltage Scanning Electron Microscope",
  booktitle="Proceedings of the 10th conference Student EEICT 2004.",
  year="2004",
  number="1",
  pages="4",
  publisher="Vysoké učení technické v Brně",
  address="Brno",
  isbn="80-214-2636-5"
}