Publication detail

Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O

OHLÍDAL, I.,OHLÍDAL, M., FRANTA, D., ČUDEK, V., BURŠÍKOVÁ, V., ŠILER, M.

Original Title

Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O

Type

conference paper

Language

English

Original Abstract

The quantitative dependence of the mechanical stress inside diamond-like carbon films containing Si and O atoms on a flow rate ratio of methane and hexamethyldisiloxane in the deposition mixture is determined. The modified Stoneys formula is employed for this purpose. The important quantities taking place in this folmula, i.e. the radius of curvature of the spherical surface of a deformed silicon substrate and the film thickness, are determined using the combined optical method based on two-beam interferometry, variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. It is shown that the influence of the flow rate ratio on the values of the mechanical stresses taking place inside these films is negligible within the experimental accuracy achieved for determining these stresses if the total flow rate of gases used to be constant in the deposition mixture. The films studied were prepared using the plasma enhanced chemical vapor deposition.

Keywords

DLC films, mechanical stress, two-beam interferometry

Authors

OHLÍDAL, I.,OHLÍDAL, M., FRANTA, D., ČUDEK, V., BURŠÍKOVÁ, V., ŠILER, M.

RIV year

2004

Released

1. 8. 2004

Publisher

SPIE-The International Society for Optical Engineering

Location

Bellingham, Washington, USA

ISBN

0-8194-5465-6

Book

Advances in Thin Film Coatings for Optical Applications

Pages from

139

Pages to

147

Pages count

9

BibTex

@inproceedings{BUT12704,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Daniel {Franta} and Vladimír {Čudek} and Vilma {Buršíková} and Martin {Šiler}",
  title="Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O",
  booktitle="Advances in Thin Film Coatings for Optical Applications",
  year="2004",
  volume="5527",
  pages="9",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Bellingham, Washington, USA",
  isbn="0-8194-5465-6"
}