Publication detail

New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM

AUTRATA, R., SCHAUER, P., WANDROL, P.

Original Title

New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM

Type

conference paper

Language

English

Original Abstract

Detection of backscattered electrons (BSE) in scanning electron microscopy (SEM) serves as an auxiliary method in the study of surfaces and composition of materials. BSE have properties that are different from those of usually used secondary electrons (SE). The achievement of the theoretical limit of resolution (0,6 - 0,8 nm for SE and 0,9 nm for BSE) depends not only on the properties of electron source, properties of electron optics, specimen preparation technique, type of electrons, but also on the detection system efficiency.

Keywords

scanning electron microscopy, YAG scintillator, backscattered electrons

Authors

AUTRATA, R., SCHAUER, P., WANDROL, P.

RIV year

2004

Released

12. 7. 2004

Publisher

Ústav přístrojové techniky AC ČR

Location

Brno

ISBN

80-239-3246-2

Book

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Pages from

11

Pages to

12

Pages count

2

BibTex

@inproceedings{BUT11809,
  author="Rudolf {Autrata} and Petr {Schauer} and Petr {Wandrol}",
  title="New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  pages="2",
  publisher="Ústav přístrojové techniky AC ČR",
  address="Brno",
  isbn="80-239-3246-2"
}