Publication detail

Trajectories of Signal Electrons in Low-Voltage BSE Detector

WANDROL, P., AUTRATA, R.

Original Title

Trajectories of Signal Electrons in Low-Voltage BSE Detector

Type

conference paper

Language

English

Original Abstract

Nowadays the development of the image formation in SEM is oriented to the use of scanning electron microscopes with low accelerating voltage of the primary beam (LV SEM). Secondary electrons and backscattered electrons (BSE) are the main components of detected signal in LV SEM. While secondary electrons can be detected either by ET or "in lens" detector, the detection of BSE in LV SEM is an unsolved problem yet.

Key words in English

low-voltage scanning electron microscopy, signal electrons trajectories, low-voltage BSE detector

Authors

WANDROL, P., AUTRATA, R.

RIV year

2004

Released

12. 7. 2004

Publisher

Ústav přístrojové techniky AC ČR

Location

Brno

ISBN

80-239-3246-2

Book

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Edition number

9.

Pages from

77

Pages to

78

Pages count

2

BibTex

@inproceedings{BUT11801,
  author="Petr {Wandrol} and Rudolf {Autrata}",
  title="Trajectories of Signal Electrons in Low-Voltage BSE Detector",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  number="9.",
  pages="2",
  publisher="Ústav přístrojové techniky AC ČR",
  address="Brno",
  isbn="80-239-3246-2"
}