Publication detail

Very Low Energy Scanning Electron Microscopy

HRNČIŘÍK, P., MULLEROVÁ, I.

Original Title

Very Low Energy Scanning Electron Microscopy

Type

conference paper

Language

English

Original Abstract

The inelastic and elastic mean free paths (IMFP and EMFP) determine the largest sample thickness usable for transmission electron microscopy (TEM). At primary electron energies normally used for TEM (>50 keV), both mean free paths decrease as the primary energy is lowered. If the primary energy is lowered to below about 100 eV, IMFP is predicted to stop decreasing and to begin growing again [1, 2]. This opens up the exciting possibility of very low voltage TEM of sufficiently thin samples, with poorer resolution but greatly reduced radiation damage compared to conventional TEM.

Key words in English

SLETEM, SLEEM, SEM

Authors

HRNČIŘÍK, P., MULLEROVÁ, I.

Released

1. 1. 2004

Publisher

Ústav přístrojové techniky AV ČR

Location

Brno

ISBN

80-239-3246-2

Book

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Pages from

33

Pages to

34

Pages count

2

BibTex

@inproceedings{BUT11285,
  author="Petr {Hrnčiřík} and Ilona {Müllerová}",
  title="Very Low Energy Scanning Electron Microscopy",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2004",
  pages="2",
  publisher="Ústav přístrojové techniky AV ČR",
  address="Brno",
  isbn="80-239-3246-2"
}