VALLEJOS VARGAS, S. HUBÁLEK, J. SEDLÁČEK, J. PRÁŠEK, J.
The unit with the ultrasonic atomizer forms the bottom of a liquid reservoir. The liquid has to be kept at a constant level of 50 mm. The piezoceramic transducer is driven by a high frequency RF generator and transmits ultrasonic waves which are focussed at the surface of the liquid. The aerosol output can be controlled by an external control voltage or a potentiometer
Aerosol Assisted CVD
Centrum SIX, Technická 3058/10, Brno