Publication detail

Microfabrication of flexible gas sensing devices based on nanostructured semiconducting metal oxides

VALLEJOS VARGAS, S. Gracia, I Figueras, E. Sanchez, J. Mas, R.Beldarrain, O. Cane, C.

Original Title

Microfabrication of flexible gas sensing devices based on nanostructured semiconducting metal oxides

Type

journal article in Web of Science

Language

English

Original Abstract

Flexible gas sensor devices comprised of heating and transducing elements are produced by directly integrating multilayer polymeric-based platforms and highly crystalline semiconducting metal oxide nanostructures grown via vapour-phase method, as main improvement over other methods for fabricating flexible gas sensors. Thermal simulations and characterizations of the heating element demonstrate these devices provide uniform temperature distribution at the sensing active area, and the electrical properties of the sensing film and electrodes indicate the networked-nanostructures are ohmically connected. Validation of the sensing device shows repeatable and satisfactory responses towards ethanol, demonstrating this fabrication method, with potential in a cost effective production for large-scale applications, is an attractive route for developing next generation of gas sensing devices provided of flexibility and functionality.

Keywords

Flexible gas sensors; Nanostructures; Tungsten oxide; AACVD

Authors

VALLEJOS VARGAS, S.; Gracia, I; Figueras, E.; Sanchez, J. ; Mas, R.;Beldarrain, O.; Cane, C.

RIV year

2014

Released

1. 11. 2014

Publisher

ELSEVIER SCIENCE SA

Location

O BOX 564, 1001 LAUSANNE, SWITZERLAND

ISBN

0924-4247

Periodical

Sensors and Actuators

Year of study

219

Number

1

State

Swiss Confederation

Pages from

88

Pages to

93

Pages count

6

URL

http://www.sciencedirect.com/science/article/pii/S0924424714003963

BibTex

@article{BUT110871,
  author="VALLEJOS VARGAS, S. and Gracia, I and Figueras, E. and Sanchez, J. and Mas, R. and Beldarrain, O. and Cane, C.",
  title="Microfabrication of flexible gas sensing devices based on nanostructured semiconducting metal oxides",
  journal="Sensors and Actuators",
  year="2014",
  volume="219",
  number="1",
  pages="88--93",
  doi="10.1016/j.sna.2014.09.001",
  issn="0924-4247",
  url="http://www.sciencedirect.com/science/article/pii/S0924424714003963"
}