Detail publikace

Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy

HORVÁTH, P., KRČMA, F., KUŘITKA, I.

Originální název

Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy

Anglický název

Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy

Jazyk

en

Originální abstrakt

Processes during the plasmochemical deposition of the organosilicones have been studied by Langmuire double probes and simultaniously by optical emision spectroscopy. Main parameters as temperature, plasma potential and excited particles have been obtained.

Anglický abstrakt

Processes during the plasmochemical deposition of the organosilicones have been studied by Langmuire double probes and simultaniously by optical emision spectroscopy. Main parameters as temperature, plasma potential and excited particles have been obtained.

Dokumenty

BibTex


@inproceedings{BUT3256,
  author="Pavel {Horváth} and František {Krčma} and Ivo {Kuřitka}",
  title="Plasma Polymerization Processes Diagnostic by Langmuir Probes and Emission Spectroscopy",
  annote="Processes during the plasmochemical deposition of the organosilicones have been studied by Langmuire double probes and simultaniously by optical emision spectroscopy. Main parameters as temperature, plasma potential and excited particles have been obtained.",
  address="Jednota slovenských matematikov a fyzikov",
  booktitle="Proceedings of 12th Symposium on Application of Plasma Processes",
  chapter="3256",
  institution="Jednota slovenských matematikov a fyzikov",
  year="1999",
  month="january",
  pages="167",
  publisher="Jednota slovenských matematikov a fyzikov",
  type="conference paper"
}