Detail publikace

Modeling Electrostatic MEMS Actuator

KOLKA, Z. BIOLKOVÁ, V. BIOLEK, D. BIOLEK, Z.

Originální název

Modeling Electrostatic MEMS Actuator

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

Klíčová slova

MEMS, electrostatic actuator, micromirror, memcapacitor, state equation, modeling, simulation, pinched hysteresis

Autoři

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.; BIOLEK, Z.

Vydáno

28. 11. 2021

Nakladatel

IEEE

Místo

Dubai, UAE

ISBN

978-1-7281-8281-0

Kniha

2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings

Strany od

1

Strany do

5

Strany počet

5

BibTex

@inproceedings{BUT175569,
  author="Zdeněk {Kolka} and Viera {Biolková} and Dalibor {Biolek} and Zdeněk {Biolek}",
  title="Modeling Electrostatic MEMS Actuator",
  booktitle="2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Proceedings",
  year="2021",
  pages="1--5",
  publisher="IEEE",
  address="Dubai, UAE",
  isbn="978-1-7281-8281-0"
}