Detail publikace

Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique

POLZER, A. SEDLÁK, J. SEDLÁČEK, J. BENEŠ, L. MOURALOVÁ, K.

Originální název

Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Vertical graphene, which belongs to nanomaterials, is a very promising tool for improving the useful properties of long-used and proven materials. Since the growth of vertical graphene is different on each base material and has specific deposition setting parameters, it is necessary to examine each base material separately. For this reason, a full factor design of experiment was performed with 2(6) = 64 rounds, which contained additional 5 central points, i.e., a total of 69 rounds of individual experiments, which was to examine the effect of input factors Temperature, Pressure, Flow, CH4, Plasma Power, and Annealing in H-2 on the growth of vertical graphene on aluminum alloy AlCu4Mg. The deposition was performed using plasma-enhanced chemical vapor deposition (PECVD) technology. Mainly, the occurrence of graphene was analyzed, which was confirmed by Raman spectroscopy, as well as its thickness. The characterization was performed using electron and transmission microscopy, including an atomic force microscope. It was found that the growth of graphene occurred in 7 cases and its thickness is affected only by the interaction flow (sccm) x pretreatment H-2 (sccm).

Klíčová slova

vertical graphene; PECVD; aluminum alloy; AlCu4Mg

Autoři

POLZER, A.; SEDLÁK, J.; SEDLÁČEK, J.; BENEŠ, L.; MOURALOVÁ, K.

Vydáno

2. 10. 2021

Nakladatel

MDPI

Místo

BASEL

ISSN

2079-6412

Periodikum

Coatings, MDPI

Ročník

11

Číslo

9

Stát

Švýcarská konfederace

Strany od

1

Strany do

13

Strany počet

13

URL

https://www.mdpi.com/2079-6412/11/9/1108

Plný text v Digitální knihovně

http://hdl.handle.net/11012/201751

BibTex

@article{BUT172661,
  author="Aleš {Polzer} and Josef {Sedlák} and Jan {Sedláček} and Libor {Beneš} and Kateřina {Mouralová}",
  title="Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique",
  journal="Coatings, MDPI",
  year="2021",
  volume="11",
  number="9",
  pages="1--13",
  doi="10.3390/coatings11091108",
  issn="2079-6412",
  url="https://www.mdpi.com/2079-6412/11/9/1108"
}