Detail publikace

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

HOLÁ, M. HRABINA, J. ŠARBORT, M. OULEHLA, J. ČÍP, O. LAZAR, J.

Originální název

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.

Klíčová slova

nanometrology; interferometry; refractive index of air

Autoři

HOLÁ, M.; HRABINA, J.; ŠARBORT, M.; OULEHLA, J.; ČÍP, O.; LAZAR, J.

Vydáno

29. 10. 2015

ISSN

1335-8871

Periodikum

Measurement Science Review

Ročník

15

Číslo

5

Stát

Slovenská republika

Strany od

263

Strany do

267

Strany počet

5

BibTex

@article{BUT138310,
  author="Miroslava {Holá} and Jan {Hrabina} and Martin {Šarbort} and Jindřich {Oulehla} and Ondřej {Číp} and Josef {Lazar}",
  title="Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry
",
  journal="Measurement Science Review",
  year="2015",
  volume="15",
  number="5",
  pages="263--267",
  issn="1335-8871"
}