Detail publikace

Thin Film Deposition of HMDSO for Barrier Applications in Archaeology

PROCHÁZKA, M. BLAHOVÁ, L. KRČMA, F.

Originální název

Thin Film Deposition of HMDSO for Barrier Applications in Archaeology

Anglický název

Thin Film Deposition of HMDSO for Barrier Applications in Archaeology

Jazyk

en

Originální abstrakt

Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on deposition of protective HMDSO thin films via plasma enhanced chemical vapour deposition for encapsulating cleaned archaeological artefacts, preventing these historical objects from destructive corrosion objects.

Anglický abstrakt

Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on deposition of protective HMDSO thin films via plasma enhanced chemical vapour deposition for encapsulating cleaned archaeological artefacts, preventing these historical objects from destructive corrosion objects.

Dokumenty

BibTex


@inproceedings{BUT109505,
  author="Michal {Procházka} and Lucie {Blahová} and František {Krčma}",
  title="Thin Film Deposition of HMDSO for Barrier Applications in Archaeology",
  annote="Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organosilicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on deposition of protective HMDSO thin films via plasma enhanced chemical vapour deposition for encapsulating cleaned archaeological artefacts, preventing these historical objects from destructive corrosion objects.",
  booktitle="Book of Contributed Papers of 27th Summer School and International Symposium on the Physics of Ionized Gases",
  chapter="109505",
  howpublished="print",
  year="2014",
  month="august",
  pages="218--221",
  type="conference paper"
}