Detail publikace

Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors

MOZALEV, A. SAKAIRI, M. TAKAHASHI, H. HABAZAKI, H. HUBALEK, J.

Originální název

Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Three types of thin solid films with the nanoscale inner structures were synthesized by sputtering-deposition and anodizing of Al layer, Al-Si alloy layer, and Al/Ta bilayer on Si wafers. All the anodic films comprised nanoporous alumina layer as the key component. The essential differences were due to the silicon impurities (AlSi alloy) and the array of nanosized tantalum oxide protrusions in the alumina barrier layer (Al/Ta bilayer). The films were examined by scanning and transmission electron microscopy and electrochemical impedance spectroscopy. Integral capacitors utilizing the anodic films as dielectrics combine the small-value capacitance (6.5 nF cm-2) with the excellent properties of high withstand field strength, low leakage current, and low loss tangent. The revealed dispersion of dielectric constant, and the presence of loss peaks on the temperature and frequency dependencies of losses denote the influence of ion-relaxation mechanism on dielectrics polarizability, with the characteristic times depending on the dielectric type. By selecting appropriate technological and electrolytic conditions, the functionality of the capacitors can be optimized to meet the needs of a specific range, from 1 kHz to about 300 MHz operating frequencies.

Klíčová slova

porous alumina; tantalum oxide; nanostructure; dielectric properties; electric polarization; integral capacitors; high-frequency performance

Autoři

MOZALEV, A.; SAKAIRI, M.; TAKAHASHI, H.; HABAZAKI, H.; HUBALEK, J.

Rok RIV

2012

Vydáno

28. 2. 2012

Nakladatel

ELSEVIER SCIENCE SA

Místo

PO BOX 564, 1001 LAUSANNE, SWITZERLAND

ISSN

0040-6090

Periodikum

Thin Solid Films

Ročník

-

Číslo

-

Stát

Nizozemsko

Strany od

1

Strany do

9

Strany počet

9

URL

http://www.sciencedirect.com/science/article/pii/S0040609012002295#

BibTex

@article{BUT96730,
  author="Alexander {Mozalev} and Masatoshi {Sakairi} and Hideaki {Takahashi} and Hiroki {Habazaki} and Jaromír {Hubálek}",
  title="Nanostructured anodic-alumina-based dielectrics for high-frequency integral capacitors",
  journal="Thin Solid Films",
  year="2012",
  volume="-",
  number="-",
  pages="1--9",
  issn="0040-6090",
  url="http://www.sciencedirect.com/science/article/pii/S0040609012002295#"
}