Detail publikace

Design and Fabrication of MEMS Low Power Heating Membrane

Originální název

Design and Fabrication of MEMS Low Power Heating Membrane

Anglický název

Design and Fabrication of MEMS Low Power Heating Membrane

Jazyk

en

Originální abstrakt

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C.

Anglický abstrakt

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C.

BibTex


@article{BUT96352,
  author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Jana {Pekárková} and Jaromír {Hubálek}",
  title="Design and Fabrication of MEMS Low Power Heating Membrane",
  annote="The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing
applications. The main goal is to produce the structure of the heating membrane using different
fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed –
suspended and close type of the membrane. The sample which is going to be produced will be a membrane with
the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate.
The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C.",
  address="Fakulta Elektrotechnická ZČU v Plzni",
  chapter="96352",
  institution="Fakulta Elektrotechnická ZČU v Plzni",
  number="VI",
  volume="2012",
  year="2012",
  month="december",
  pages="1--3",
  publisher="Fakulta Elektrotechnická ZČU v Plzni",
  type="journal article - other"
}