Detail publikace

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

IVANOV, P., HUBÁLEK, J., MALYSZ, K.

Originální název

Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing technique, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX.

Klíčová slova

micro hot plate, sceenprinting, sputtering, SEM, XRD, EDX, ammonia sensor

Autoři

IVANOV, P., HUBÁLEK, J., MALYSZ, K.

Vydáno

1. 1. 2003

Místo

Povoa de Varzim, Portugalsko

ISBN

0-9733840-0

Kniha

Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute

Strany od

291

Strany do

291

Strany počet

1

BibTex

@inproceedings{BUT8395,
  author="Peter {Ivanov} and Jaromír {Hubálek} and Karel {Malysz}",
  title="Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds",
  booktitle="Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute",
  year="2003",
  pages="1",
  address="Povoa de Varzim, Portugalsko",
  isbn="0-9733840-0"
}