Detail publikace

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

IVANOV, P., LLOBET, E., HUBÁLEK, J., MALYSZ, K., CORREIG, X.

Originální název

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied.

Klíčová slova

gas sensors, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis

Autoři

IVANOV, P., LLOBET, E., HUBÁLEK, J., MALYSZ, K., CORREIG, X.

Rok RIV

2003

Vydáno

9. 9. 2003

Nakladatel

Ing. Zdeněk Novotný CSc.

Místo

Brno

ISBN

80-214-2452-4

Kniha

10th Electronic devices and Systems Conference 2003

Strany od

354

Strany do

357

Strany počet

4

BibTex

@inproceedings{BUT8024,
  author="Peter {Ivanov} and Eduard {Llobet} and Jaromír {Hubálek} and Karel {Malysz} and Xavier {Correig}",
  title="Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures",
  booktitle="10th Electronic devices and Systems Conference 2003",
  year="2003",
  pages="4",
  publisher="Ing. Zdeněk Novotný CSc.",
  address="Brno",
  isbn="80-214-2452-4"
}