Detail publikace

Methods Used to Determine Exposition Curve for Diffractive Relief

DANĚK, L.

Originální název

Methods Used to Determine Exposition Curve for Diffractive Relief

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper is focused on methods used to measure data for determination of exposition curve, assigns rules of exact measurement, describes limitations of used measurement methods, and suggests new pattern satisfying assigned rules.

Klíčová slova

exposition curve, electron-beam lithography

Autoři

DANĚK, L.

Vydáno

1. 1. 2003

Místo

Brno

ISBN

80-214-2379-X

Kniha

PROCEEDINGS OF 9th CONFERENCE AND COMPETITION STUDENT EEICT 2003 Volume 3

Číslo edice

1.

Strany od

422

Strany do

424

Strany počet

3

URL

http://www.feec.vutbr.cz

BibTex

@inproceedings{BUT7700,
  author="Lukáš {Daněk}",
  title="Methods Used to Determine Exposition Curve for Diffractive Relief",
  booktitle="PROCEEDINGS OF 9th CONFERENCE AND COMPETITION STUDENT EEICT 2003 Volume 3",
  year="2003",
  number="1.",
  pages="3",
  address="Brno",
  isbn="80-214-2379-X",
  url="http://www.feec.vutbr.cz"
}