Detail publikace

Optical constants of plasma-polymerized tetravinylsilane films

ČECHALOVÁ, B. STUDÝNKA, J. ČECH, V.

Originální název

Optical constants of plasma-polymerized tetravinylsilane films

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We have focused on the optical properties of thin plasma-polymerized films deposited from a mixture of tetravinylsilane and oxygen gas and evaluated by means of spectroscopic ellipsometry. The RF effective power of pulsed plasma and the oxygen/total flow rate ratio were varied in broad range. We found a clear link between the RF effective power used and optical properties (refractive index, extinction coefficient, band gap) of the films.

Klíčová slova

plasma polymerization, optical properties, ellipsometry

Autoři

ČECHALOVÁ, B.; STUDÝNKA, J.; ČECH, V.

Rok RIV

2007

Vydáno

13. 12. 2007

ISBN

978-4-9903773-2-8

Kniha

18th International Symposium on Plasma Chemistry

Strany od

1

Strany do

4

Strany počet

4

BibTex

@inproceedings{BUT28338,
  author="Božena {Čechalová} and Jan {Studýnka} and Vladimír {Čech}",
  title="Optical constants of plasma-polymerized tetravinylsilane films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}