Detail publikace

Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence

GLOGINJIC, M. ERICH, M. MRAVIK, Ž. VRBAN, B. ČERBA, Š. LÜLEY, J. FILOVÁ, V. KATOVSKÝ, K. ŠŤASTNÝ, O. BURIAN, J. PETROVIC, S.

Originální název

Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence

Typ

článek ve sborníku mimo WoS a Scopus

Jazyk

angličtina

Originální abstrakt

During the ion implantation process, regardless if it was attentional or not, amorphization will be introduced into the crystal structure. Depending on the chosen ions, different quantities of the amorphization will be introduced for the same applied fluences. In order to estimate the total amorphization of the SiC crystal for different ions and fluences combination, an assessment model was proposed. For this purpose, 4 MeV carbon and silicon ions with multiple fluences were implanted in the axial direction of a 6H-SiC single crystal. The amorphization depth distributions were obtained by Elastic Backscattering Spectroscopy/channeling spectra analysis via Channeling SIMulation (CSIM) phenomenological computer code. As a result, relation of the total induced amorphization and implantation fluences for carbon and silicon ions were obtained.

Klíčová slova

ion implantation; SiC; carbon ions; silicon ions; 4 MeV; Elastic Backscattering Spectroscopy

Autoři

GLOGINJIC, M.; ERICH, M.; MRAVIK, Ž.; VRBAN, B.; ČERBA, Š.; LÜLEY, J.; FILOVÁ, V.; KATOVSKÝ, K.; ŠŤASTNÝ, O.; BURIAN, J.; PETROVIC, S.

Vydáno

22. 9. 2022

Nakladatel

Serbian Ceramic Society

Místo

Belgrade, Republic of Serbia

ISBN

978-86-915627-9-3

Kniha

Proc. of 10th Serbian Ceramic Society Conference ADVANCED CERAMICS AND APPLICATION X "New Frontiers in Multifunctional Material Science and Processing"

Edice

1

Číslo edice

1

Strany počet

1

URL

https://vinar.vin.bg.ac.rs/handle/123456789/10822

BibTex

@inproceedings{BUT184164,
  author="Marko {Gloginjic} and Marko {Erich} and Željko {Mravik} and Branislav {Vrban} and Štefan {Čerba} and Jakub {Lüley} and Vendula {Filová} and Karel {Katovský} and Ondřej {Šťastný} and Jiří {Burian} and Srdjan {Petrovic}",
  title="Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence",
  booktitle="Proc. of 10th Serbian Ceramic Society Conference ADVANCED CERAMICS AND APPLICATION X {"}New Frontiers in Multifunctional Material Science and Processing{"}",
  year="2022",
  series="1",
  number="1",
  pages="1",
  publisher="Serbian Ceramic Society",
  address="Belgrade, Republic of Serbia",
  isbn="978-86-915627-9-3",
  url="https://vinar.vin.bg.ac.rs/handle/123456789/10822"
}