Detail publikace

Deposition of MoSe2 flakes using cyclic selenides

CHARVOT, J. ZAZPE MENDIOROZ, R. KRUMPOLEC, R. RODRIGUEZ PEREIRA, J. PAVLIŇÁK, D. POKORNÝ, D. KLIKAR, M. JELÍNKOVÁ, V. MACÁK, J. BUREŠ, F.

Originální název

Deposition of MoSe2 flakes using cyclic selenides

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl5 affording MoSe2. A thorough characterization of the as-deposited 2D MoSe2 flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe2.

Klíčová slova

atomic layer deposition; Se

Autoři

CHARVOT, J.; ZAZPE MENDIOROZ, R.; KRUMPOLEC, R.; RODRIGUEZ PEREIRA, J.; PAVLIŇÁK, D.; POKORNÝ, D.; KLIKAR, M.; JELÍNKOVÁ, V.; MACÁK, J.; BUREŠ, F.

Vydáno

3. 6. 2021

Nakladatel

Royal Society of Chemistry

Místo

CAMBRIDGE

ISSN

2046-2069

Periodikum

RSC Advances

Ročník

11

Číslo

36

Stát

Spojené království Velké Británie a Severního Irska

Strany od

22140

Strany do

22147

Strany počet

8

URL

https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c

Plný text v Digitální knihovně

http://hdl.handle.net/11012/203221

BibTex

@article{BUT172926,
  author="Jaroslav {Charvot} and Raúl {Zazpe Mendioroz} and Richard {Krumpolec} and Jhonatan {Rodriguez Pereira} and David {Pavliňák} and Daniel {Pokorný} and Milan {Klikar} and Veronika {Jelínková} and Jan {Macák} and Filip {Bureš}",
  title="Deposition of MoSe2 flakes using cyclic selenides",
  journal="RSC Advances",
  year="2021",
  volume="11",
  number="36",
  pages="22140--22147",
  doi="10.1039/d0ra10239c",
  issn="2046-2069",
  url="https://pubs.rsc.org/en/content/articlehtml/2021/ra/d0ra10239c"
}