Detail publikace

Simple and efficient AlN-based piezoelectric energy harvesters

GABLECH, I. KLEMPA, J. PEKÁREK, J. VYROUBAL, P. HRABINA, J. HOLÁ, M. KUNZ, J. BRODSKÝ, J. NEUŽIL, P.

Originální název

Simple and efficient AlN-based piezoelectric energy harvesters

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficients d33 of (7.33 ± 0.08) pC∙N−1. The fabrication of PEH was completed using just three lithography steps, conventional silicon substrate with full control of the cantilever thickness, in addition to the thickness of the proof mass. As the AlN deposition was conducted at a temperature of ≈ 330 °C, the process can be implemented into standard complementary metal oxide semiconductor (CMOS) technology, as well as the CMOS wafer post-processing. The PEH cantilever deflection and efficiency were characterized using both laser interferometry, and a vibration shaker, respectively. This technology could become a core feature for future CMOS-based energy harvesters.

Klíčová slova

AlN; MEMS cantilever; CMOS compatible; energy harvesting; high performance

Autoři

GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; HRABINA, J.; HOLÁ, M.; KUNZ, J.; BRODSKÝ, J.; NEUŽIL, P.

Vydáno

28. 1. 2020

Nakladatel

MDPI

Místo

Basel, Switzerland

ISSN

2072-666X

Periodikum

Micromachines

Ročník

11

Číslo

2

Stát

Švýcarská konfederace

Strany od

1

Strany do

10

Strany počet

10

URL

https://www.mdpi.com/2072-666X/11/2/143

Plný text v Digitální knihovně

http://hdl.handle.net/11012/186577

BibTex

@article{BUT161587,
  author="Imrich {Gablech} and Jaroslav {Klempa} and Jan {Pekárek} and Petr {Vyroubal} and Jan {Hrabina} and Miroslava {Holá} and Jan {Kunz} and Jan {Brodský} and Pavel {Neužil}",
  title="Simple and efficient AlN-based piezoelectric energy harvesters",
  journal="Micromachines",
  year="2020",
  volume="11",
  number="2",
  pages="1--10",
  doi="10.3390/mi11020143",
  issn="2072-666X",
  url="https://www.mdpi.com/2072-666X/11/2/143"
}