Detail publikace

About the information depth of backscattered electron imaging

Š. MIKMEKOVÁ L. FRANK

Originální název

About the information depth of backscattered electron imaging

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

he information depth of imaging with backscattered electrons in the scanning electron microscope was measured directly by comparison of a planar view of a steel sample with buried precipitates with an image of a section cut through precipitates by means of a Focused Ion Beam attachment. The information depth was determined across the electron energy range of units of keV and the results were compared with information depths calculated from two published equations and simulated using widely available Monte Carlo‐based software. Recommendations are given for routine estimations of BSE information depths.

Klíčová slova

Backscattered electrons, information depth, penetration of electrons

Autoři

Š. MIKMEKOVÁ L. FRANK

Vydáno

1. 3. 2017

Nakladatel

Royal Microscopical Society

ISSN

1365-2818

Periodikum

Journal of Microscopy

Ročník

266

Číslo

3 2017

Stát

Spojené království Velké Británie a Severního Irska

Strany od

335

Strany do

342

Strany počet

7

URL

https://onlinelibrary.wiley.com/doi/abs/10.1111/jmi.12542

BibTex

@article{BUT149390,
  author="Jakub {Piňos}",
  title="About the information depth of backscattered electron imaging",
  journal="Journal of Microscopy",
  year="2017",
  volume="266",
  number="3 2017",
  pages="335--342",
  doi="10.1111/jmi.12542",
  issn="1365-2818",
  url="https://onlinelibrary.wiley.com/doi/abs/10.1111/jmi.12542"
}