Detail publikace

DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT

SKALSKÝ, M.

Originální název

DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT

Anglický název

DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT

Jazyk

en

Originální abstrakt

This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.

Anglický abstrakt

This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.

Dokumenty

BibTex


@inproceedings{BUT135190,
  author="Michal {Skalský}",
  title="DOUBLE-BEAM MACH-ZEHNDER INTERFEROMETER FOR THIN PIEZOELECTRIC FILMS MEASUREMENT",
  annote="This paper describes a Mach-Zehnder double-beam interferometer for measurement of piezoelectric films thickness displacement. The measurement of the sample from both sides with probing beam leads to suppression of bending effect, which can otherwise strongly degrade the results acquired by other methods. The performances of the setup were tested on a reference PZT sample. The measured piezoelectric coefficient was in agreement with its theoretical value. The described setup utilizes minimal number of the optical components which are necessary for controlled phase drift compensation. Further techniques for performance enhancement are also proposed.",
  booktitle="Proceedings of the 23rd Conference STUDENT EEICT 2017",
  chapter="135190",
  howpublished="online",
  year="2017",
  month="april",
  pages="441--445",
  type="conference paper"
}