Detail publikace

Local electron-sample interaction during scanning electron microscopy on organic and metallic objects

KASPAR, P.

Originální název

Local electron-sample interaction during scanning electron microscopy on organic and metallic objects

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

To ascertain how high energy of an electron is needed to acquire a sufficient data yield from organic and metallic sample, a Monte Carlo algorithm is used to compare the behaviour of electrons after contact with the material. Primary electron trajectory, elastic and inelastic scattering and secondary electron generation are described in this paper.

Klíčová slova

SEM, Monte Carlo, Electron scattering, Secondary electron

Autoři

KASPAR, P.

Vydáno

28. 4. 2016

Nakladatel

Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií

Místo

Brno

ISBN

978-80-214-5350-0

Kniha

Student EEICT Proceedings of the 22nd Student Competition Conference

Číslo edice

1

Strany od

738

Strany do

742

Strany počet

5

BibTex

@inproceedings{BUT124370,
  author="Pavel {Kaspar}",
  title="Local electron-sample interaction during scanning electron microscopy on organic and metallic objects",
  booktitle="Student EEICT Proceedings of the 22nd Student Competition Conference",
  year="2016",
  number="1",
  pages="738--742",
  publisher="Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií",
  address="Brno",
  isbn="978-80-214-5350-0"
}