Detail publikace

Tin Dioxide – Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection

GABLECH, I. PRÁŠEK, J.

Originální název

Tin Dioxide – Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection

Typ

konferenční sborník (ne článek)

Jazyk

angličtina

Originální abstrakt

The aim of this work is design, fabrication and characterization of semiconductive gas sensor with active layer based on tin dioxide and multiwalled carbon nanotubes for isobutene detection. Combination of LTCC technology and thick-film technology was chosen for sensor fabrication due to the need of high operating temperature. These technologies allow the sensor to be heated up to 500 °C. Gold/titanium interdigitated electrodes on silicon substrate were chosen to achieve higher sensitivity. Titanium layer has high temperature resistance and provides very good adhesion to silicon substrate and top gold layer that improves conductivity of these finger electrodes. Several important parameters of active layer influencing sensor properties were investigated. Influence of suitable volume of multiwalled carbon nanotubes in tin dioxide active layer, active layer thickness and operating temperature to sensing properties were studied. It was found that the active layer with the largest amount of multiwalled carbon nanotubes and operating temperature of 350 °C has the best sensitivity. The thinnest active layer has the fastest response and recovery time.

Klíčová slova

tin dioxide, carbon nanotubes, gas sensor, ltcc

Autoři

GABLECH, I.; PRÁŠEK, J.

Vydáno

20. 10. 2014

Místo

Brno

ISBN

978-80-210-7159-9

Kniha

Book of Abstracts CEITEC Annual Conference "Frontiers in Material nad Life Sciences"

Edice

1

Číslo edice

1

Strany počet

1

BibTex

@proceedings{BUT114357,
  editor="Imrich {Gablech} and Jan {Prášek}",
  title="Tin Dioxide – Multiwalled Carbon Nanotubes Based Gas Sensor for Isobutane Detection",
  year="2014",
  series="1",
  number="1",
  pages="1",
  address="Brno",
  isbn="978-80-210-7159-9"
}