Detail publikace

Mechanical and electrical properties of evaporated thin layers

Originální název

Mechanical and electrical properties of evaporated thin layers

Anglický název

Mechanical and electrical properties of evaporated thin layers

Jazyk

en

Originální abstrakt

The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.

Anglický abstrakt

The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.

BibTex


@article{BUT114331,
  author="Tomáš {Vejmola} and Doaa {W. F. Yahya} and Josef {Šandera}",
  title="Mechanical and electrical properties of evaporated thin layers",
  annote="The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well.",
  chapter="114331",
  howpublished="online",
  number="3",
  volume="2014",
  year="2014",
  month="december",
  pages="1--4",
  type="journal article"
}