Detail publikace

A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation

SALYK, O., SCHAUER, F., ZMEŠKAL, O., ZUBÍK, K., POLCER, J., BOUŠEK, J.

Originální název

A-Si:H Prepared by magnetoactive Hydrogen Plasma Stream Assited Evaporation

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The deposition of a-Si:H by electron beam evaporation and ion beam hydrogenation is described. The films are characterized by density, hydrogen content and refractive index and by SIMS and AES analysis. The transport properties were determined by conductivity and photoconductivity measurements and using the temperature modulated space charge limited currents method (TM-SCLC)

Klíčová slova v angličtině

amorphous hydrogenated silicon, evaporation, ion beam

Autoři

SALYK, O., SCHAUER, F., ZMEŠKAL, O., ZUBÍK, K., POLCER, J., BOUŠEK, J.

Vydáno

1. 9. 1989

Místo

Užhorod

Strany od

III. -114