Detail publikace

Burning conditions of nonthermal Ar plasma at continuous and pulsed mode

PŘIKRYL, R. STUDÝNKA, J. ČECH, V.

Originální název

Burning conditions of nonthermal Ar plasma at continuous and pulsed mode

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

A new capacitively coupling system has been developed for the plasma treatment and coating of planar substrates. The system with a bottom rotary electrode and an up- per grounded shower type electrode can be evacuated to the basic vacuum of 10-6 Pa using a turbomolecular pump. A side load lock can be used to feed the bottom electrode by six substrates double-side polished silicon wafer 10x10x0.6mm3) using a magnetic drive. The reactor was equipped by an RF power supply of 1 000W (13.56 MHz) operated in continuous and pulsed mode. The distance between both the electrodes can be posi- tioned from 20mm to 60 mm. Discharge conditions of Ar plasma have been determined with respect to the argon Flow-rate (2 - 50 sccm), pressure (0:5 - 50Pa) and RF power of continuous (1 - 300W) and pulsed (0:1 - 300W) mode for two distances of the elec- trodes (30 and 60 mm). Processing chart pressure vs. power has been constructed in order to found out conditions for stable Ar{plasma. The stability of glow discharge was observed by phototransistor, sensitive in the range 300 - 850 nm. The self-bias of the bottom elec- trode was monitored as a function of the RF power, flow-rate and pressure as well.

Klíčová slova

argon palsma, PECVD technology

Autoři

PŘIKRYL, R.; STUDÝNKA, J.; ČECH, V.

Rok RIV

2006

Vydáno

26. 6. 2006

Nakladatel

Institute of Physics.. Academy of Sciences of the Czech Republic

Místo

Praha CR

ISSN

0011-4626

Periodikum

Czechoslovak Journal of Physics

Ročník

56

Číslo

B

Stát

Česká republika

Strany od

1320

Strany do

1325

Strany počet

6

BibTex

@article{BUT43252,
  author="Radek {Přikryl} and Jan {Studýnka} and Vladimír {Čech}",
  title="Burning conditions of nonthermal Ar plasma at continuous and pulsed mode",
  journal="Czechoslovak Journal of Physics",
  year="2006",
  volume="56",
  number="B",
  pages="1320--1325",
  issn="0011-4626"
}