Detail publikace

Design and Fabrication of MEMS Low Power Heating Membrane

SVATOŠ, V. MÁRIK, M. PEKÁREK, J. SLAVÍK, J. CHOMOUCKÁ, J. HUBÁLEK, J.

Originální název

Design and Fabrication of MEMS Low Power Heating Membrane

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C.

Klíčová slova

MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.

Autoři

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; SLAVÍK, J.; CHOMOUCKÁ, J.; HUBÁLEK, J.

Rok RIV

2012

Vydáno

31. 12. 2012

Nakladatel

Fakulta Elektrotechnická ZČU v Plzni

Místo

Plzeň

ISSN

1802-4564

Periodikum

ElectroScope - http://www.electroscope.zcu.cz

Ročník

2012

Číslo

VI

Stát

Česká republika

Strany od

1

Strany do

3

Strany počet

3

BibTex

@article{BUT96352,
  author="SVATOŠ, V. and MÁRIK, M. and PEKÁREK, J. and SLAVÍK, J. and CHOMOUCKÁ, J. and HUBÁLEK, J.",
  title="Design and Fabrication of MEMS Low Power Heating Membrane",
  journal="ElectroScope - http://www.electroscope.zcu.cz",
  year="2012",
  volume="2012",
  number="VI",
  pages="1--3",
  issn="1802-4564"
}