Detail publikace

INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

Originální název

INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

Anglický název

INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

Jazyk

en

Originální abstrakt

A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.

Anglický abstrakt

A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.

BibTex


@inproceedings{BUT95974,
  author="Marina {Santo-Zarnik} and Darko {Belavič} and Vlasta {Sedláková} and Josef {Šikula} and Martin {Kopecký} and Petr {Sedlák} and Jiří {Majzner}",
  title="INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR",
  annote="A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noise in the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.",
  address="IMAPS CZ&SK",
  booktitle="EDS 2012 Proceedings",
  chapter="95974",
  howpublished="print",
  institution="IMAPS CZ&SK",
  year="2012",
  month="june",
  pages="251--256",
  publisher="IMAPS CZ&SK",
  type="conference paper"
}