Detail publikace

Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM

VYROUBAL, P. MAXA, J.

Originální název

Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Environmental scanning electron microscopy (ESEM) is one of the latest trends in microscopic methods. This type of microscope can works in two modes. In the vacuum mode, it acts as conventional scanning electron microscope (SEM). In the environmental mode, the microscope works at higher pressures in the specimen chamber, which has its advantages. We can observe samples electrically non-conductive and even wet samples without the risk of damage by drying. Scintillation and ionization detectors are used to detect secondary electrons. The ionization detector works on the principle of impact ionization. The scintillation detector contains a scintillator (e.g. YAG, CRY 18, etc.), which releases electrons when they hit a flash of light whose intensity is proportional to the energy of incident electrons. This article deals with analysis of the scintillation detector using CAD, CAE and ANSYS systems and applications with Laval nozzle aperture.

Klíčová slova

Aperture, circular hole, Environmental scanning electron microscope, Laval nozzle, scintillation detector, trajectory of secondary electrons.

Autoři

VYROUBAL, P.; MAXA, J.

Rok RIV

2012

Vydáno

30. 5. 2012

Nakladatel

Silhavy sro.

Místo

Vsetín

ISBN

978-80-904741-1-6

Kniha

2nd Computer Science On-Line Conference in 2012

Edice

1

Číslo edice

1

Strany od

149

Strany do

155

Strany počet

7

BibTex

@inproceedings{BUT92269,
  author="Petr {Vyroubal} and Jiří {Maxa}",
  title="Analysis of the Impact of Supersonic Flow in Detector of Secondary Electrons ESEM",
  booktitle="2nd Computer Science On-Line Conference in 2012",
  year="2012",
  series="1",
  number="1",
  pages="149--155",
  publisher="Silhavy sro.",
  address="Vsetín",
  isbn="978-80-904741-1-6"
}